Semiconductor Process Integration (Semiconductor Academy 6)

Semiconductor Process Integration (Semiconductor Academy 6) free download

Process Flow/Process Integration, FEOL/BEOL process, HKMG (High-K Metal Gate), Foundry, MOSFET/CMOS, Planar FET

• This course provides a comprehensive overview of semiconductor process flow and HKMG technique. You'll learn critical process concepts and purpose of each process step, equipping you with the state-of-the-art knowledge and skills to enter the semiconductor foundries.

• What you will learn in this class ?   

  (1)  Introduction to Semiconductor Manufacturing

  • Semiconductors: The foundation of modern electronics

  • Brief history: From transistors to microchips

  • Moore's Law and its impact on process technology

  • Overview of the complete process flow

    
    

  (2)  Basic Semiconductor Process Steps: An Overview

  • Wafer fabrication: Silicon ingot growth and wafer slicing

  • Front-end-of-line (FEOL): Transistor formation

  • Back-end-of-line (BEOL): Interconnect formation

  • Testing and packaging: Ensuring functionality and reliability

  • Four Key Process Modules

    
    

  (3)  Front-End-of-Line (FEOL): Transistor Formation, including the following steps,

  • STI (Shallow Trench Isolation) engineering

  • Well engineering

  • Gate engineering

  • LDD (Lightly Doped Drain)/ Spacer/ Source & Drain engineering

  • Introduction to HCI (Hot Carrier Injection) effect

  • Other Implantation engineering including Vt Implantation and Halo Implantation

    
    

  (4)  Back-End-of-Line (BEOL): Interconnect Formation, including the following steps,

  • Silicide engineering

  • ILD (Inter-Layer Dielectric) engineering

  • Contact engineering

  • Metal layer engineering / Dual Damascene process

  • IMD (Inter-Metal Dielectric) / Via engineering

  • Passivation engineering

    
    

  (5)  HKMG (High-K Metal Gate) technique

  • What is HKMG and its advantage

  • Comparison between HKMG and Poly Gate

  • HKMG Process Flow

  (6)  Ending & Forecast:

  • An overview from past courses to future courses